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제품소개

  • Wafer
  • Photo resist
  • E-beam resist
  • Spin coater & Hot plate
  • WETSEM
  • Coming soon

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Spin coater

1. ASC-80 - 4" Spin coater
ㆍ  Academic 1/2" ~ 4" Spin Coater
ㆍ  Speed: 200 - 10,000 rpm
ASC-80 - 4" Spin coater
 Product Features
   - 5 coating recipes (5 ramps in each recipe).
   - Adjustable rpm, timer and acceleration.
   - Brushless motor with accurate rpm control.
   - Aluminum chassis and PP coating chamber.
   - Easy clean vacuum path.
   - Detachable coating pan.
   - LCD screen.

Specifications
ModelRPM
 Adj.		RPM
  Range		AccelerationRecipe No.Ramps for recipeDrainSample sizeDimensions (mm)
ASC-801200 - 10000100 - 1000055N/A< 4"210 x 250 x 200
ASC-100100 - 12000100 - 30000101016 mm< 6"359 x 256 x 258
ASC-20020 - 100000 - 5000010010016 mm< 8"433 x 306 x 306
ASC-3000 - 50000 - 1000010010016 mm< 12"613 x 463 x 306