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Positive ebeam resist

4. HARP PMMA and Copolymer
ㆍ  High Aspect Ratio PMMA and Copolymer for e-Beam resist
ㆍ  PMMA molecular weights: 950K, 495K
Dilutions from 2% up to 11% (other dilution are available upon request)
ㆍ  Thickness: approx. 50 nm - 3700 nm
ㆍ  Copolymer dilutions from 6% up to 12% (other dilution are available upon request)
ㆍ  Thickness: approx. 170 nm - 1100 nm
ㆍ  저렴한 가격. 판매 용량: 500 ml, 1 L, 4 L.
HARP PMMA and Copolymer
Description
Applications
  - HARP PMMA (polymethyl methacrylate) resist is designed for
    high resolution direct write e-Beam lithography.
  - When combined with HARP-C copolymer the HARP multi-layer
    system is ideal for T-gate manufacture.
  - HARP PMMA has excellent adhesion to a wide variety of
    substrates, and is used as a protective coating layer for
    wafer thinning and sacrificial layers.
  - 판매 용량: 500 ml, 1 L and 4 L.
  - e-beam direct write lithography.
  - Multi-layer T-gate manufacture.
  - X-Ray LIGA.
  - Protective Coating for wafer thinning.

Product Offering
Results
 1000 HARP eB
  - Highest Mw (molecular weight) PMMA polymer.
  - Manufactured in Anisole.
  - Best resolution & contrast PMMA.
  - Competes with 950K PMMA.

 500 HARP eB
  - PMMA Polymer with mid-range Mw (molecular weight).
  - Faster throughput versus 1000 HARP eB.
  - Manufactured in Anisole.
  - Competes with 495K PMMA.

 HARP-C
  - MMA/MAA (methyl methacrylate/methacrylic acid) copolymer.
  - Manufactured in Ethyl Lactate.
  - Used in multi-layer process with PMMA.
  - Competes with MMA(8.5)MAA.
100 nm features
100nm_features_1_min.jpg 100nm_features_2_min.jpg

40 nm features
40nm_features_1_min.jpg

HARP PMMA & Copolymer Products
500 HARP PMMA  
Product Approx. FT (μm) @ 2000 RPM Approx. Viscosity (cst) Competes with
500 HARP eB 0.07 0.07 5 495K PMMA A2
500 HARP eB 0.15 0.15 9 495K PMMA A3
500 HARP eB 0.2 0.2 14 495K PMMA A4
500 HARP eB 0.3 0.3 21 495K PMMA A5
500 HARP eB 0.4 0.4 32 495K PMMA A6
500 HARP eB 0.7 0.7 63 495K PMMA A8
500 HARP eB 1.5 1.5 169 495K PMMA A11
1000 HARP PMMA  
Product Approx. FT (μm) @ 2000 RPM Approx. Viscosity (cst) Competes with
1000 HARP eB 0.1 0.1 8 950K PMMA A2
1000 HARP eB 0.2 0.2 15 950K PMMA A3
1000 HARP eB 0.3 0.3 27 950K PMMA A4
1000 HARP eB 0.4 0.45 47 950K PMMA A5
1000 HARP eB 0.7 0.7 75 950K PMMA A6
1000 HARP eB 1.3 1.3 191 950K PMMA A8
1000 HARP eB 1.7 1.7 282 950K PMMA A9
1000 HARP eB 2.7 2.7 620 950K PMMA A11
HARP-C Copolymer  
Product Approx. FT (μm) @ 2000 RPM Approx. Viscosity (cst) Competes with
HARP-C 0.2 0.2 9 8.5 MAA EL 6
HARP-C 0.4 0.4 18 8.5 MAA EL 9
HARP-C 0.5 0.5 22 8.5 MAA EL 10
HARP-C 0.7 0.7 30 8.5 MAA EL 11
HARP-C 0.8 0.8 39 8.5 MAA EL 12

Spin Curves
Spin Curve: 500 HARP PMMA Series (thin)
Spin Curve: 500 HARP PMMA Series (thick)
Spin Curve_500 HARP PMMA Series_thin_min.jpg
Spin_Curve_500_HARP_PMMA_Series_thick_min.jpg
Spin Curve: 1000 HARP PMMA Series (thin)
Spin Curve: 1000 HARP PMMA Series (thick)
Spin_Curve_1000_HARP_PMMA_Series_thin_min.jpg
Spin_Curve_1000_HARP_PMMA_Series_thick_min.jpg
Spin Curve:  HARP-C Copolymer Series
Spin_Curve_HARP_C_Copolymer_Series_min.jpg