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제품소개

  • Wafer
  • Photo resist
  • E-beam resist
  • Spin coater & Hot plate
  • WETSEM
  • Coming soon

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Photo resist

1. PSC-1003 and PSC-1010
ㆍ  Protective Surface Coating for dicing, dry etch and wet etch.
ㆍ  판매 용량: 1 L, 4 L, 16 L 이외.
PSC-1003 and PSC-1010
Description
 - Protective surface coating.
 - Film Thickness range 2.4 – 10 μm.
 - Resist without any photoactive materials.
 - Protection of dicing, dry etch and wet etch.

PSC-1003 Spin Curve
PSC-1003 and PSC-1010 Film Thickness
PSC-1003_Spin_Curve.jpg
ProductmicronsApp. Viscosity (cst)
PSC-10032.4 - 5.358
PSC-101010 (at 2000 RPM)500

PSC-1003 and PSC-1010 Process Guidelines
Product:PSC-1003PSC-1010
Soft bake105 °C for 1.5 - 2 min105 °C for 2 - 4 min
ExposureN/AN/A
StripIndustry Standard (acetone-based, NMP-based, O2 plasma, etc.)Industry Standard (acetone-based, NMP-based, O2 plasma, etc.)