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Spin coater (6)
Hot plate (2)

1. EZ4 - 4" Spin coater

ㆍ	Academic 1/2" ~ 4" Spin Coater
ㆍ	Speed: 100 - 9,999 rpm
ㆍ	Vacuum Pump, Vacuum Plate 제공

EZ4 - 4 inch Spin coater

EZ4 Vacuum Spin Coater Specifications

- Max. Wafer Diameter: 4 inch.
- Speed range: 100 - 9,999 rpm (Accuracy: ±1 rpm).
- Vacuum pump, chuck (3ea) 포함.
- 5 programmable, 5steps.
- Compact size: 250 W x 210 D x 200 H mm.

Features

Spin Coater - 1 Set	Oiless vacuum pump - 1 Set	Vacuum Plate - 3 Pieces

Specifications

Model	RPM Adj.	RPM Range	Acceleration	Recipe No.	Ramps for recipe	Drain	Sample size	Dimensions (mm)
EZ4	1	100 - 9999	100 - 9999	5	5	N/A	< 4"	250 x 210 x 200
ASC-100		100 - 12000	100 - 30000	10	10	16 mm	< 6"	359 x 256 x 258
ASC-200		20 - 10000	0 - 50000	100	100	16 mm	< 8"	433 x 306 x 306
ASC-300		0 - 5000	0 - 10000	100	100	16 mm	< 12"	613 x 463 x 306