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Negative photo resist

4. HARE SQ OptiCoat - Optical Gragde Negative Epoxy Photoresist
ㆍ  Optical Grade Negative Epoxy Photoresist
ㆍ  Higher transparency. Improved optical stability
ㆍ  Thickness: 1.5 μm - 100 μm
ㆍ  저렴한 가격. 0.5 L, 1 L, 4 L, 16 L 이외 용량 선택 가능
ㆍ  납기일: 3 ~ 5 주
HARE SQ OptiCoat - Optical Grade Epoxy Negative Photoresist
Description and Advantages
Features
 HARE SQ OptiCoat is an advanced epoxy-based negative photoresist for permanent devices with demanding optical parameters such as waveguides and sensors.
 Using patent-pending advanced chemistry, higher transparency can be maintained over a wide temperature range.
- Epoxy resin with superior cleanliness and excellent reproducibility.
- Improved optical stability.
- Reduced oxidative stress.
- Fully compatible with SU-8 processes.		- Chemistry:         SU-8 polymer epoxy
- Tone:                  Negative
- Film Thickness:   1.5 - 100 μm single coat
- Sensitivity:          NUV, Broadband, i-line
                            (possible e-beam  lithography)
- Developer:         HARE SQ Developer, PGMEA

HARE SQ Optical Grade Comparison 25 um FT,
24 hrs @ 150 C
HARE SQ 25 Optical Grade vs
Standard HARE SQ 25 (Oven Testing @ 175 C)
HARE_SQ_OptiCoat_Optical_Grade_Comparison
HARE_SQ_OptiCoat_Optical_Grade_Comparison2

HARE SQ OptiCoat Thin Spin Curve
HARE SQ OptiCoat Spin Curve
HARE_SQ_OptiCoat_Spin_Curve_Thin_RS.png
HARE_SQ_OptiCoat_Spin_Curve_Thick_RS.png

Process Guide
Product:
Film thickness
(@ 2000RPM):		HARE SQ OptiCoat 2
  2 μm		HARE SQ OptiCoat 5
5 μm		HARE SQ OptiCoat 10
10 μm		HARE SQ OptiCoat 25
25 μm		HARE SQ OptiCoat 50
  50 μm		HARE SQ OptiCoat 50
  100 μm
Softbake (2 step)65 °C for 1 min
95 °C for 1 min		65 °C for 1 min
95 °C for 3 min		65 °C for 2 min
95 °C for 5 min		65 °C for 3 min
95 °C for 7 min		65 °C for 5 min
95 °C for 15 min		65 °C for 10 min
95 °C for 30 min
Exposure
(Broadbandon Si
with 360nm filter)		200 mJ/cm2180 mJ/cm2180 mJ/cm2180 mJ/cm2180 mJ/cm2180 mJ/cm2
Post Exposure Bake
(2 step)		65 °C for 1 min
95 °C for 2 min		65 °C for 1 min
95 °C for 2 min		65 °C for 1 min
95 °C for 2 min		65 °C for 1 min
95 °C for 3 min		65 °C for 1 min
  95 °C for 5 min		65 °C for 2 min
  95 °C for 10 min
Develop (immersion)1 min1 min2.5  min3.5 min6 min15 min

Process results
HARE_SQ_OptiCoat_Logo_and_posts_in_50_um_film
KemLab Logo and posts in 50 μm film
HARE_SQ_OptiCoat_5_um_dense_line_space_in_25_um_film
5 μm dense line/space in 25 μm film
Products Guide
Tone
Product (link)
Film Thickness (µm)
Feature
Adhesion Promoter SurPass NA Apply resist: Novolac, DNQ, PMMA, HSQ, PMGI, SU-8, SML, PI, ...
Negative HARE SQ series 2 – 100 and 200* Epoxy.
SQ QuickDry series 2 – 200 Epoxy, Quick drying solvent.
SQ MicroCoat series 0.05 – 2 Epoxy, Thin film, Surface protection.
SQ OptiCoat series 2 – 100 Epoxy, Higher transparency.
APOL-LO 3200 series 2 – 10+ Lift-off profile.
KL NPR series 1 – 20 Vertical profile.
Image Reversal KL IR 15,
KL IR Lift-Off 15		 1.2 – 2.6 Lift-off profile (negative),
Vertical profile (negative).
Positive KL 7000 series 0.15 – 3 High resolution, No PFAS and Fluorine.
KL 6000 series 2.5 – 11 General thick purpose.
K-PRO series 0.8 – 25 and 50* Plating and etch application.
Advanced packaging
Protective Surface Coating PSC-1003 2.4 – 5.3 Protective Surface Coating
PSC-IB DPM 1010 10 (@ 2000 RPM) Protective Surface Coating
* Double coating.